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Sol-Gel Processing of Oxide Gate Insulator from Trifluoroacetate Precursors

Authors :
Shinobu Fujihara
Keisuke Yamamoto
Toshio Kimura
Source :
Key Engineering Materials. :259-262
Publication Year :
2002
Publisher :
Trans Tech Publications, Ltd., 2002.

Subjects

Subjects :
chemistry.chemical_compound
Materials science
Lanthanum oxide
chemistry
Mechanics of Materials
Mechanical Engineering
Inorganic chemistry
Oxide
Gate insulator
General Materials Science
Thin film
Fluoride
Sol-gel

Details

ISSN :
16629795
Database :
OpenAIRE
Journal :
Key Engineering Materials
Accession number :
edsair.doi...........a41a0c82e46a56d938dddd3dc12bb881

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