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Grating-based precision measurement system for five-dimensional measurement

Authors :
王 玮 Wang Wei
李文昊 Li Wenhao
刘兆武 Liu Zhao-wu
巴音贺希格 Bayanheshig
姜 珊 Jiang Shan
刘 林 Liu Lin
吕 强 Lv Qiang
宋 莹 Song Ying
Source :
Chinese Optics. 13:189-202
Publication Year :
2020
Publisher :
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, 2020.

Details

ISSN :
20951531
Volume :
13
Database :
OpenAIRE
Journal :
Chinese Optics
Accession number :
edsair.doi...........a3f6756f2338120f4834ce638b783013
Full Text :
https://doi.org/10.3788/co.20201301.0189