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Grating-based precision measurement system for five-dimensional measurement
- Source :
- Chinese Optics. 13:189-202
- Publication Year :
- 2020
- Publisher :
- Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, 2020.
Details
- ISSN :
- 20951531
- Volume :
- 13
- Database :
- OpenAIRE
- Journal :
- Chinese Optics
- Accession number :
- edsair.doi...........a3f6756f2338120f4834ce638b783013
- Full Text :
- https://doi.org/10.3788/co.20201301.0189