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Inspection in Semiconductor Manufacturing
- Source :
- Wiley Encyclopedia of Electrical and Electronics Engineering
- Publication Year :
- 1999
- Publisher :
- John Wiley & Sons, Inc., 1999.
-
Abstract
- The sections in this article are 1 Defect Reduction Cycle in Semiconductor Manufacturing 2 Inspection in the IC Manufacturing Process Life Cycle 3 Optical Imaging Technology 4 Laser-Scattering Technology 5 Measurement of Optical Scatter from Contaminants on Wafers 6 Automatic Defect Classification 7 Future Challenges 8 Conclusions 9 Acknowledgments
Details
- Database :
- OpenAIRE
- Journal :
- Wiley Encyclopedia of Electrical and Electronics Engineering
- Accession number :
- edsair.doi...........a3b777db846c4bbb1acfa362729ac7ea
- Full Text :
- https://doi.org/10.1002/047134608x.w5532