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Mechanical Properties of Epilayers of Metastable α- and ε-Ga2O3 Phases Studied by Nanoindentation

Authors :
L. I. Guzilova
A. S. Grashchenko
P. N. Butenko
A. V. Chikiryaka
A. I. Pechnikov
V. I. Nikolaev
Source :
Technical Physics Letters. 47:709-713
Publication Year :
2021
Publisher :
Pleiades Publishing Ltd, 2021.

Subjects

Subjects :
Physics and Astronomy (miscellaneous)

Details

ISSN :
10906533 and 10637850
Volume :
47
Database :
OpenAIRE
Journal :
Technical Physics Letters
Accession number :
edsair.doi...........a343d6c0123a8ecdcb10ab1fdfc0a8c9
Full Text :
https://doi.org/10.1134/s106378502107021x
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