Influence of Conditions Employed in Application of Ti–Zr–Si–N Nanostructured Coatings on their Composition, Structure, and Tribomechanical Properties

Nanostructured coatings of thickness from 1.5 to 2 μm are applied to Ar+ ions-prepurifi ed stainless steel substrates by means of reactive magnetron sputtering of composite targets with the content of Ti–Zr–Si components 56, 36, 8 at.% and 36, 56, 8 at.%, respectively. Using the methods of Rutherford back scattering and transmission electron microscopy, we studied the structure of the coatings obtained, their phase composition, and the distribution of components over the depth of coatings. The microhardness of coatings was measured and their basic tribomechanical characteristics were investigated. The dependence of the composition and properties of coatings on the conditions of their application has been examined. The optimum regimes of application of coatings with high tribomechanical properties that ensure microhardness of coating of 31 GPa and double decrease in the friction coeffi cient have been determined.