Figuring of elliptical hard X-ray focusing mirror using 1-dimensional numerically controlled local wet etching

Numerically controlled local wet etching (NC-LWE) is a novel figuring method for fabricating the ultraprecision optics or finishing the functional materials. In this method, the localized etching area is formed by applying the combination nozzle that is constructed from the supply part and the suction part of the etchant, and the removal volume anywhere on the workpiece surface is determined by the dwelling time of the nozzle. We applied the NC-LWE for fabricating the piano-elliptical mirror made of synthesized quartz glass to focus the hard X-ray beam, and achieved a figure error of 27 nm (p-v) by applying a 1-dimensional numerically controlled figuring utilizing a square-shaped nozzle.