3D nano-printing coupler for silicon nitride suspended waveguide

Authors :: Mohit Khurana
Sina Baghbani-Kordmahale
Connor Bowerman
Xiaohan Liu
Alexey Akimov
Source :: Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XV.
Publication Year :: 2022
Publisher :: SPIE, 2022.

Database :: OpenAIRE
Journal :: Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XV
Accession number :: edsair.doi...........a2cd4da831706d8ed39841343337c7f5
Full Text :: https://doi.org/10.1117/12.2608393