Etching damage induced performance degradation in spin transfer torque magnetic random access memory fabrication

MLA

Guchang Han, et al. “Etching Damage Induced Performance Degradation in Spin Transfer Torque Magnetic Random Access Memory Fabrication.” Journal of Vacuum Science & Technology B, vol. 39, Sept. 2021, p. 052210. EBSCOhost, https://doi.org/10.1116/6.0001256.

APA

Guchang Han, Zhenghu Zuo, Xiaorui Chen, Shuguang Wang, Zhenghui Ji, & Hui Ye. (2021). Etching damage induced performance degradation in spin transfer torque magnetic random access memory fabrication. Journal of Vacuum Science & Technology B, 39, 052210. https://doi.org/10.1116/6.0001256

Chicago

Guchang Han, Zhenghu Zuo, Xiaorui Chen, Shuguang Wang, Zhenghui Ji, and Hui Ye. 2021. “Etching Damage Induced Performance Degradation in Spin Transfer Torque Magnetic Random Access Memory Fabrication.” Journal of Vacuum Science & Technology B 39 (September): 052210. doi:10.1116/6.0001256.