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Effects of CF4Plasma Treatment on pH and pNa Sensing Properties of Light-Addressable Potentiometric Sensor with a 2-nm-Thick Sensitive HfO2Layer Grown by Atomic Layer Deposition

Authors :
Chi-Hang Chin
Tseng-Fu Lu
Jer-Chyi Wang
Jung-Hsiang Yang
Cheng-En Lue
Chia-Ming Yang
Sheng-Shian Li
Chao-Sung Lai
Source :
Japanese Journal of Applied Physics. 50:04DL06
Publication Year :
2011
Publisher :
IOP Publishing, 2011.

Subjects

Subjects :
Physics and Astronomy (miscellaneous)
General Engineering
General Physics and Astronomy

Details

ISSN :
13474065 and 00214922
Volume :
50
Database :
OpenAIRE
Journal :
Japanese Journal of Applied Physics
Accession number :
edsair.doi...........a2935813e5e45704ff04d863d42fe7d3

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