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Analyses and Formation Mechanism of Indium Tin Oxide Target Nodules

Authors :
Ryuichi Komatsu
Seiichiro Takahashi
Source :
Transactions of the Materials Research Society of Japan. 35:639-642
Publication Year :
2010
Publisher :
The Materials Research Society of Japan, 2010.

Subjects

Subjects :
Nodule (geology)
Materials science
Chemical engineering
Sputtering
Metallurgy
engineering
engineering.material
Mechanism (sociology)
Indium tin oxide

Details

ISSN :
21881650 and 13823469
Volume :
35
Database :
OpenAIRE
Journal :
Transactions of the Materials Research Society of Japan
Accession number :
edsair.doi...........a26dd4497b52fda3e0948410d54dc238
Full Text :
https://doi.org/10.14723/tmrsj.35.639
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