A thin film force sensor on AISI 5140 steel surface with multilayer SI3N4/AL2O3 film as insulation structure

Authors :: Xuerui Li
Gongqi Yu
Haiping Zhang
Zhen Cao
Wenbo Li
Jiongli Li
Xudong Wang
Source :: Thin Solid Films. 775:139797
Publication Year :: 2023
Publisher :: Elsevier BV, 2023.

Subjects :: Materials Chemistry
Metals and Alloys
Surfaces and Interfaces
Surfaces, Coatings and Films
Electronic, Optical and Magnetic Materials

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