Back to Search Start Over

Preparation of porous Mo-doped VO2 films via atomic layer deposition and post annealing

Authors :
Xinrui Lv
Lixin Song
Lin Lv
Yunzhen Cao
Xin Chai
Yuzhi Zhang
Source :
Japanese Journal of Applied Physics. 60:085501
Publication Year :
2021
Publisher :
IOP Publishing, 2021.

Subjects

Subjects :
Post annealing
Atomic layer deposition
Materials science
Physics and Astronomy (miscellaneous)
Chemical engineering
Doping
General Engineering
General Physics and Astronomy
Porosity

Details

ISSN :
13474065 and 00214922
Volume :
60
Database :
OpenAIRE
Journal :
Japanese Journal of Applied Physics
Accession number :
edsair.doi...........a1dd8cef630feac991ac05c3dd8d2bdc

Tools

Authors Abstract Subjects Details