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Rigiflex Lithography for Nanostructure Transfer

Authors :
Dongchul Suh
Hyunjung Lee
Se-Jin Choi
Source :
Advanced Materials. 17:1554-1560
Publication Year :
2005
Publisher :
Wiley, 2005.

Subjects

Subjects :
Materials science
Nanostructure
Mechanical Engineering
Nanotechnology
Soft lithography
law.invention
Resist
Mechanics of Materials
law
General Materials Science
Stencil lithography
X-ray lithography
Photolithography
Lithography
Next-generation lithography

Details

ISSN :
15214095 and 09359648
Volume :
17
Database :
OpenAIRE
Journal :
Advanced Materials
Accession number :
edsair.doi...........a1d2fe4b1c5d63373dec9132636ecfcc
Full Text :
https://doi.org/10.1002/adma.200402010
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