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CAD system interface for a stand-alone E-beam tester

Authors :
Steven S Henning
Graham S Plows
W. Ralph Knowles
Source :
Microelectronic Engineering. 7:317-325
Publication Year :
1987
Publisher :
Elsevier BV, 1987.

Subjects

Subjects :
Computer science
Interface (computing)
Electron beam processing
Electrical and Electronic Engineering
Condensed Matter Physics
Cad system
Atomic and Molecular Physics, and Optics
Simulation
Surfaces, Coatings and Films
Electronic, Optical and Magnetic Materials

Details

ISSN :
01679317
Volume :
7
Database :
OpenAIRE
Journal :
Microelectronic Engineering
Accession number :
edsair.doi...........a1bc0977f10ae4b5458f8c699ab8fca5

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Authors Abstract Subjects Details