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Resonance frequency vs. magnetic field analysis for ScA1N/Si SAW resonators with magnetostrictive metalization on the nanolithographic IDTs
- Source :
- 2022 International Semiconductor Conference (CAS).
- Publication Year :
- 2022
- Publisher :
- IEEE, 2022.
Details
- Database :
- OpenAIRE
- Journal :
- 2022 International Semiconductor Conference (CAS)
- Accession number :
- edsair.doi...........a130fbf4270d119f304315a3fbf9d4f5
- Full Text :
- https://doi.org/10.1109/cas56377.2022.9934338