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Aerosol deposition of alumina films on microstructured silicon substrates

Authors :
Yasuhito Matsubayashi
Jun Akedo
Source :
Ceramics International. 49:21570-21576
Publication Year :
2023
Publisher :
Elsevier BV, 2023.

Subjects

Subjects :
Process Chemistry and Technology
Materials Chemistry
Ceramics and Composites
Surfaces, Coatings and Films
Electronic, Optical and Magnetic Materials

Details

ISSN :
02728842
Volume :
49
Database :
OpenAIRE
Journal :
Ceramics International
Accession number :
edsair.doi...........a09cd8dfafd248960f0cef9b3119d7d2

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