Direct observation of microscopic change induced by oxygen vacancy drift in amorphous TiO2 thin films

Authors :: Jeong Yong Lee
Sung-Yool Choi
Hu Young Jeong
Source :: Applied Physics Letters. 97:042109
Publication Year :: 2010
Publisher :: AIP Publishing, 2010.
Abstract: To clarify the resistive switching and failure mechanisms in Al/amorphous TiO2/Al devices we investigate the microscopic change in amorphous titanium oxide films and interface layers after the set process according to film deposition temperatures. For low temperature (

Subjects :: Materials science
Physics and Astronomy (miscellaneous)
Direct observation
chemistry.chemical_element
Nanotechnology
Oxygen
Dissociation (chemistry)
Amorphous solid
Titanium oxide
chemistry
Aluminium
Thin film
Composite material
Chemical decomposition

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