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A prototype model of micro mobile machine with piezoelectric driving force actuator

Authors :
H. Okamoto
T. Matsuoka
T. Matsui
M. Asano
S. Mitsuishi
Source :
1994 5th International Symposium on Micro Machine and Human Science Proceedings.
Publication Year :
2002
Publisher :
IEEE, 2002.

Subjects

Subjects :
Materials science
Piezoelectric motor
Piezoelectric accelerometer
Active vibration control
Vibration control
PMUT
Mechanical engineering
Control engineering
Actuator
Piezoelectricity
Electronic circuit

Details

Database :
OpenAIRE
Journal :
1994 5th International Symposium on Micro Machine and Human Science Proceedings
Accession number :
edsair.doi...........9f78f426a8466c5cadcbc002813285fc
Full Text :
https://doi.org/10.1109/ismmhs.1994.512897
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