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Sedimentation of Impurity Atoms in InSb Semiconductor under a Strong Gravitational Field

Authors :
Masao Ono
Satoru Okayasu
Tsutomu Mashimo
Yusuke Iguchi
Source :
Defect and Diffusion Forum. :319-322
Publication Year :
2009
Publisher :
Trans Tech Publications, Ltd., 2009.

Abstract

An atomic-scale graded structure has been formed by sedimentation of substitutional atoms under an ultra-strong gravitational field of 1 million G level in alloys and compounds. In this study, we investigate the sedimentation of impurity atoms in semiconductor materials under a strong gravitational field. High-temperature ultracentrifuge experiments (0.59×106 G, 400°C, 60 hours) have been performed on an InSb single crystal wafer which surface was coated with Ge by means of Physical Vapor Deposition (PVD). It was observed that the penetration depth of diffused Ge atoms under the gravitational field was several times larger than under terrestrial field at the same temperatures.

Details

ISSN :
16629507
Database :
OpenAIRE
Journal :
Defect and Diffusion Forum
Accession number :
edsair.doi...........9e6faa403534778a899fa0037ec9a916
Full Text :
https://doi.org/10.4028/www.scientific.net/ddf.289-292.319