Role of Oxygen on Chemical Segregation in Uncapped Ge2Sb2Te5 Thin Films on Silicon Nitride

Authors :: Chanchal Ghosh
Helena Silva
Manish Kumar Singh
Gokhan Bakan
Paul G. Kotula
Shalini Tripathi
C. Barry Carter
Source :: ECS Journal of Solid State Science and Technology. 9:054007
Publication Year :: 2020
Publisher :: The Electrochemical Society, 2020.

Subjects :: chemistry.chemical_compound
Materials science
chemistry
Silicon nitride
Chemical engineering
chemistry.chemical_element
Thin film
Oxygen
Electronic, Optical and Magnetic Materials

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