Slight Etching of Silicon to Control Post-RIE Damage

Subjects

Subjects :

Materials science
Plasma etching
Silicon
chemistry
Etching (microfabrication)
Plasma etcher
Environmental chemistry
Plasma chemistry
chemistry.chemical_element
Dry etching
Reactive-ion etching
Composite material
Plasma processing

Details

Database :

OpenAIRE

Journal :

Proceedings of 1st International Symposium on Plasma Process-Induced Damage

Accession number :

edsair.doi...........9dea2cede9b3d7e43b5b763b552b73b7

Full Text :

https://doi.org/10.1109/ppid.1996.715222