Back to Search Start Over

Fast In-Device Overlay Metrology on DRAM Storage Node Contact and Its Applications in Process Control

Authors :
Rui Qin
Shaowen Qiu
Yunsheng Xia
Silva Hu
Jimmy Chang
Junjun Zhang
Wei Zhang
Panpan Wang
Xiaofang Zhou
Elton Bitincka
Giacomo Miceli
Sylvia Yuan
Natalia Drabik
Pavel Izikson
Giulia Argento
Yvon Chai
Yu Liu
Justin Jiang
Hao Jing
Shaun Dai
Source :
2021 International Workshop on Advanced Patterning Solutions (IWAPS).
Publication Year :
2021
Publisher :
IEEE, 2021.

Details

Database :
OpenAIRE
Journal :
2021 International Workshop on Advanced Patterning Solutions (IWAPS)
Accession number :
edsair.doi...........9d6fd7391ae88306d1589093af5f3eea

Tools

Authors Abstract Subjects Details