Design-enabled manufacturing enablement using manufacturing design request tracker (MDRT)

The shrinking dimensions with advanced technologies pose yield challenges which require continuous enhancement of yield methodologies to quickly detect and fix the marginal layout features. In this paper, we present a practical approach to enhance the DFM and DEM capabilities suite provided by GLOBALFOUNDRIES for 28nm technology and beyond. The MDRT system has been implemented in the Product Lifecycle Management (PLM) system within GLOBALFOUNDRIES.