Back to Search Start Over

Visible and near-infrared ridge waveguides in fused silica glasses by oxygen ion implantation and femtosecond laser ablation

Authors :
Chun-Xiao Liu
Wang Sun
Zi-Heng Zeng
Yan-Jun Zhou
Liao-Lin Zhang
Li-Li Fu
Qing-Yang Yue
Source :
Modern Physics Letters B. 37
Publication Year :
2023
Publisher :
World Scientific Pub Co Pte Ltd, 2023.

Abstract

A two-dimensional waveguide is the building block in integrated photonic circuits. In this work, the 5.0 MeV oxygen ion implantation at a dose of [Formula: see text] ions/cm2 was carried out on the fused silica glass for the formation of the planar waveguide. Then, a femtosecond laser was employed to ablate the ion-implanted surface at a speed of 200 [Formula: see text]m/s for the construction of the ridge waveguide. The energy depositions of the oxygen ion implantation into the fused silica glass were simulated by the SRIM 2013. The microscopic morphology of the ridge waveguide was photographed by a Nikon microscope. The near-field intensity distributions of the ridge waveguide at 532 nm and 976 nm were measured by using the end-face coupling system. The ion-implanted and femtosecond-ablated ridge waveguide on the fused silica glass has the potential as a photonic device for integrated optical systems at the visible and near-infrared bands.

Details

ISSN :
17936640 and 02179849
Volume :
37
Database :
OpenAIRE
Journal :
Modern Physics Letters B
Accession number :
edsair.doi...........9d33f298e448f89a07810966c7a58d4c