High oriented ZnO films by sol–gel and chemical bath deposition combination method

Poly-crystalline ZnO films with high oriented columnar grains were deposited on ZnO-coated seed layers by chemical bath deposition (CBD) in an aqueous-solution bath containing zinc nitrate [Zn(NO 3 ) 2 ·6H 2 O], and dimethylamineborane (DMAB) at 60 °C without pre-activation especially. Sol–gel ZnO films on glass substrates were used as the seed layers which the mean size of the crystals in seed layer increased from several to approximately 80 nm at temperature from 150 °C to 550 °C. The deposited ZnO films on the ZnO-coated seed surfaces are preferentially on the (0 0 2) plane and exhibit increased from several 10 nm to 150 nm with increasing seed layer grain size.