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Silicon photonic components for integrated optical systems
- Source :
- 2012 17th Opto-Electronics and Communications Conference.
- Publication Year :
- 2012
- Publisher :
- IEEE, 2012.
-
Abstract
- We show that the properties of silicon can be changed profoundly when nanofabricated to below 5nm, resulting in larger bandgap emission and more efficient light generation. Moreover, three-dimensional nanostructures can be fabricated at these nanoscale dimensions by dynamic control over the dry etching process.
Details
- Database :
- OpenAIRE
- Journal :
- 2012 17th Opto-Electronics and Communications Conference
- Accession number :
- edsair.doi...........9cd5c09e622a895e6e3c635c5ab2edf1