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Production of a sheet plasma with high uniformity of density distribution

Authors :
Yasuhiro Ogawa
Katsuhiko Sunako
Norio Miura
Masahiro Sumiya
Kazutaka Kawamura
Kazuo Takayama
Kenzo Nanri
Source :
Journal of Advanced Science. 4:c32-c32
Publication Year :
1992
Publisher :
Society of Advanced Science, 1992.

Subjects

Subjects :
Materials science
Density distribution
Production (economics)
Plasma
Molecular physics

Details

ISSN :
18813917 and 09155651
Volume :
4
Database :
OpenAIRE
Journal :
Journal of Advanced Science
Accession number :
edsair.doi...........9cb88c72cfd48bbda29c4f7fe643383a
Full Text :
https://doi.org/10.2978/jsas.4.4_c32
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