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Thorium dioxide thin films in the extreme ultraviolet

Authors :
Amy B. Grigg
Nicole Brimhall
David D. Allred
R. Steven Turley
Source :
SPIE Proceedings.
Publication Year :
2006
Publisher :
SPIE, 2006.

Abstract

We have measured the reflectance and transmittance of thorium dioxide thin films from 50-280 eV. We have developed several methods for fitting this data that gives the most reliable values for the complex index of refraction, n = 1 - δ + iβ. These fitting methods included fitting film thickness using interference fringes in highly transmissive areas of the spectrum and fitting reflectance and transmittance data simultaneously. These techniques give more consistent optical constants than solitary unconstrained fitting of reflectance as a function of angle. Using these techniques, we have found approximate optical constants for thorium dioxide in this energy range. We found that the absorption edges of thoria were shifted 4 eV and 2 eV to lower energies from those of thorium. We also found that the peak in δ was shifted by 3 eV to lower energy from that of thorium.

Details

ISSN :
0277786X
Database :
OpenAIRE
Journal :
SPIE Proceedings
Accession number :
edsair.doi...........9cb3851b726f35b8e27c3a0105d4c1e4
Full Text :
https://doi.org/10.1117/12.687201