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Microscopic Structure of Directly Bonded Silicon Substrates
Microscopic Structure of Directly Bonded Silicon Substrates
- Source :
- Key Engineering Materials. 470:164-170
- Publication Year :
- 2011
- Publisher :
- Trans Tech Publications, Ltd., 2011.
-
Abstract
- Using X-ray microdiffraction (XRMD) and transmission electron microscopy (TEM) techniques, we have investigated the microscopic structure of Si(011)/Si(001) direct silicon bonding (DSB) substrates. XRMD was performed to measure the local lattice spacing and tilting in the samples before and after oxide out-diffusion annealing. Diffraction analyses for (022) lattice planes with two orthogonal in-plane directions of X-ray incidence revealed anisotropic domain textures in the Si(011) layer. Such anisotropy was also confirmed by TEM in the morphology at the Si(011)/Si(001) bonded interface. The anisotropic crystallinity is discussed on the basis of interfacial defect structures which are proper to the DSB substrate.
Details
- ISSN :
- 16629795
- Volume :
- 470
- Database :
- OpenAIRE
- Journal :
- Key Engineering Materials
- Accession number :
- edsair.doi...........9c1191d801ace77f32b5407e4a9827a5
- Full Text :
- https://doi.org/10.4028/www.scientific.net/kem.470.164