(Invited) Developments of ALD Processes: Experiments and Thermodynamic Evaluations

MLA

Raphaël Boichot, et al. “(Invited) Developments of ALD Processes: Experiments and Thermodynamic Evaluations.” ECS Transactions, vol. 33, Oct. 2010, pp. 321–32. EBSCOhost, https://doi.org/10.1149/1.3485268.

APA

Raphaël Boichot, Ioana Nuta, Stéphane Daniele, Perrine Violet, Arnaud Mantoux, Virginie Brizé, & Elisabeth Blanquet. (2010). (Invited) Developments of ALD Processes: Experiments and Thermodynamic Evaluations. ECS Transactions, 33, 321–332. https://doi.org/10.1149/1.3485268

Chicago

Raphaël Boichot, Ioana Nuta, Stéphane Daniele, Perrine Violet, Arnaud Mantoux, Virginie Brizé, and Elisabeth Blanquet. 2010. “(Invited) Developments of ALD Processes: Experiments and Thermodynamic Evaluations.” ECS Transactions 33 (October): 321–32. doi:10.1149/1.3485268.