Double Zone Thermal CVD and Plasma Enhanced CVD Systems for Deposition of Films/Coatings with Eminent Conformal Coverage

Details

Database :

OpenAIRE

Journal :

Lecture Notes in Mechanical Engineering ISBN: 9789811695223

Accession number :

edsair.doi...........9b2797d954ed66d9a813835e6441c0ab

Full Text :

https://doi.org/10.1007/978-981-16-9523-0_31