Room-Temperature Patterning of Nanoscale MoS2 under an Electron Beam

Authors :: Mohamed Asbahi
Karen S. L. Chong
Asadullah Ibn Saifullah
Sing Shy Liow
Mohammad S. M. Saifullah
Maryam Binti-Kamran Kiyani
Tanmay Dutta
Sukant K. Tripathy
Anna Marie Yong
Hui Ru Tan
Surani Bin Dolmanan
Neeraj Dwivedi
Ramakrishnan Ganesan
Esther A. H. Ong
Suresh Valiyaveettil
Source :: ACS Applied Materials & Interfaces. 12:16772-16781
Publication Year :: 2020
Publisher :: American Chemical Society (ACS), 2020.
Abstract: Molybdenum disulfide (MoS2) is traditionally grown at a high temperature and subsequently patterned to study its electronic properties or make devices. This method imposes severe limitations on the...

Subjects :: inorganic chemicals
Chemical substance
Materials science
business.industry
macromolecular substances
chemistry.chemical_compound
Nanolithography
Resist
chemistry
Cathode ray
bacteria
Optoelectronics
General Materials Science
business
Science, technology and society
Nanoscopic scale
Molybdenum disulfide
Electron-beam lithography

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