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CMOS Compatible Al‐Doped ZnO Sol–Gel Thin‐Film Properties
- Source :
- physica status solidi (a). 219:2100480
- Publication Year :
- 2022
- Publisher :
- Wiley, 2022.
Details
- ISSN :
- 18626319 and 18626300
- Volume :
- 219
- Database :
- OpenAIRE
- Journal :
- physica status solidi (a)
- Accession number :
- edsair.doi...........9aea228c0a2411d65ee34dd7105d9c7b
- Full Text :
- https://doi.org/10.1002/pssa.202100480