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Tolerance assurance of interferometer for optical HCB process

Authors :
王永宪 Wang Yong-xian
赵 亚 Zhao Ya
李钰鹏 Li Yu-peng
姚 东 Yao Dong
王 智 Wang Zhi
沙 巍 Sha Wei
Source :
Optics and Precision Engineering. 26:1945-1953
Publication Year :
2018
Publisher :
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, 2018.

Subjects

Subjects :
Interferometry
Optics
Materials science
business.industry
Process (computing)
business
Atomic and Molecular Physics, and Optics
Electronic, Optical and Magnetic Materials

Details

ISSN :
1004924X
Volume :
26
Database :
OpenAIRE
Journal :
Optics and Precision Engineering
Accession number :
edsair.doi...........9ae8eba331918f63e3fd056d9a451457
Full Text :
https://doi.org/10.3788/ope.20182608.1945
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