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Impact of vacuum on the resistive switching in HfO2-based conductive-bridge RAM with highly-doped silicon bottom electrode
- Source :
- Materials Science and Engineering: B. 271:115267
- Publication Year :
- 2021
- Publisher :
- Elsevier BV, 2021.
-
Abstract
- Moisture can modulate the resistive switching dynamics in oxide-based electrochemical metallization devices. Unconventional testing environments such as vacuum, could possibly shift the device characteristics, requiring therefore a careful investigation. This work investigates the write/erase behavior of Cu/HfO2(~80-nm-thick)/p+-Si devices in ambient atmosphere and vacuum, under similar electrical bias applied to the top Cu electrode. In vacuum (~5.3 × 10−3 Pa), a parasitic negative SET (N-SET) readily arises during the “erase” operation, unlike in ambient air. The electrical studies and physicochemical analyses of electrically-biased and pristine devices reveal that the “erase” process is sensitive to the environment. Vacuum facilitates the electric-field-controlled generation of an oxygen-vacancy-based path that likely induces a parasitic N-SET at the negative voltage. This path is aided by the presence of partially-ruptured copper filaments at the HfO2/p+-Si interface. The vacuum effects leading to the N-SET are eliminated by introducing a passivating gas environment (zero-air or nitrogen), or device encapsulation.
- Subjects :
- 010302 applied physics
Materials science
Silicon
business.industry
Mechanical Engineering
Doping
Oxide
chemistry.chemical_element
Biasing
02 engineering and technology
021001 nanoscience & nanotechnology
Condensed Matter Physics
Electrochemistry
01 natural sciences
Copper
chemistry.chemical_compound
chemistry
Mechanics of Materials
0103 physical sciences
Electrode
Optoelectronics
General Materials Science
0210 nano-technology
business
Electrical conductor
Subjects
Details
- ISSN :
- 09215107
- Volume :
- 271
- Database :
- OpenAIRE
- Journal :
- Materials Science and Engineering: B
- Accession number :
- edsair.doi...........9a7dda5b0a12d4ebe88f4c5830d69d24