Highly charged ion scattering on single-crystalline (0001) and zinc-oxide surfaces

The angular (φ-) dependences of the yields of scattered ions and neutrals were measured when 8–80 keV Ar8+ ions were obliquely incident on the single-crystalline ZnO (0001) and ( 000 1 ¯ ) surfaces at small incidence angles of ψ = 5, 7, and 9° measured relative to the plane of the surface. The φ dependences of the yields had a peak near the specular reflection angle that is φ ∼ 2ψ. The maximum yields of the ( 000 1 ¯ ) surfaces at the peaks were almost twice as large as those of the (0001) surfaces at each incidence angle ψ for a given energy E. A faint difference between the two polarity surfaces was observed in the ψ-dependences of the maximum yields. The influence of the surface polarity on the scattering processes was examined by comparison with simulated results.