Effect of microstructural evolution on mechanical and electrical properties of Ag–Mo thin films

Authors :: Jiajun Zhu
Lingping Zhou
Deyi Li
Wulin Yang
Chao Zhang
Baolong Gao
Licai Fu
Source :: Surface Engineering. 37:1143-1154
Publication Year :: 2021
Publisher :: Informa UK Limited, 2021.
Abstract: Herein, Ag–Mo films were deposited on Si(100) substrates by magnetron co-sputtering. The phase evolution and microstructural investigation revealed that the pure Ag phase and no Ag(Mo) solid soluti...

Subjects :: Microstructural evolution
Materials science
Phase (matter)
Cavity magnetron
Materials Chemistry
Surfaces and Interfaces
Sputter deposition
Composite material
Thin film
Condensed Matter Physics
Microstructure
Phase evolution
Surfaces, Coatings and Films

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