Back to Search Start Over

Morphological characteristics and formation mechanism of latent scratches in chemical mechanical polishing

Authors :
Xiaolong Han
Zhuji Jin
Qing Mu
Ying Yan
Ping Zhou
Source :
Journal of Materials Processing Technology. 307:117689
Publication Year :
2022
Publisher :
Elsevier BV, 2022.

Subjects

Subjects :
Modeling and Simulation
Metals and Alloys
Ceramics and Composites
Industrial and Manufacturing Engineering
Computer Science Applications

Details

ISSN :
09240136
Volume :
307
Database :
OpenAIRE
Journal :
Journal of Materials Processing Technology
Accession number :
edsair.doi...........98e7e2ba0ee73a9701c708af71f8247d

Tools

Authors Abstract Subjects Details