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Mixed-Substituted Single-Source Precursors for Si1–xGex Thin Film Deposition
- Source :
- Inorganic Chemistry. 61:17248-17255
- Publication Year :
- 2022
- Publisher :
- American Chemical Society (ACS), 2022.
- Subjects :
- Inorganic Chemistry
Physical and Theoretical Chemistry
Subjects
Details
- ISSN :
- 1520510X and 00201669
- Volume :
- 61
- Database :
- OpenAIRE
- Journal :
- Inorganic Chemistry
- Accession number :
- edsair.doi...........9821de442fd2b526207d4c1eca596de3
- Full Text :
- https://doi.org/10.1021/acs.inorgchem.2c02835