Role of Surface Chemistry of Ceria Nanoparticles in CMP

MLA

Jihoon Seo, et al. “Role of Surface Chemistry of Ceria Nanoparticles in CMP.” ECS Meeting Abstracts, Apr. 2014, p. 1425. EBSCOhost, https://doi.org/10.1149/ma2014-01/38/1425.

APA

Jihoon Seo, Jinok Moon, Kijung Kim, Yehwan Kim, Sangkyun Kim, & Ungyu Paik. (2014). Role of Surface Chemistry of Ceria Nanoparticles in CMP. ECS Meeting Abstracts, 1425. https://doi.org/10.1149/ma2014-01/38/1425

Chicago

Jihoon Seo, Jinok Moon, Kijung Kim, Yehwan Kim, Sangkyun Kim, and Ungyu Paik. 2014. “Role of Surface Chemistry of Ceria Nanoparticles in CMP.” ECS Meeting Abstracts, April, 1425. doi:10.1149/ma2014-01/38/1425.