Broadband Mo/Si multilayer analyzers for the 15–17 nm wavelength range

Aperiodic molybdenum/silicon broadband multilayer analyzers with constant reflectivity over a wide spectral range for a fixed incidence angle have been designed using a combined analytical/numerical method. The analyzers were fabricated using direct current magnetron sputtering and characterized using the soft X-ray polarimeter at the BESSY facility. Nearly constant s-reflectivity, up to 37%, is observed over the 15–17 nm wavelength range at a grazing incidence angle of 50°, and the degree of polarization is over 98%. Furthermore, the analyzer also exhibits high s-reflectivity and polarization over a broad angular range, 43–53°, at a fixed wavelength of 15.5 nm. This kind of broadband multilayer analyzer can be used in extreme ultraviolet polarization measurements, and will greatly simplify experimental arrangements.