FABRICATION AND CHARACTERIZATION OF IN-PLANE POLARIZED PZT FILMS WITH INTERDIGITAL ELECTRODES

In this paper, Pb(Zr0.53,Ti0.47)O3 films are deposited on titania by sol-gel method, and PZT films of ∼4 μm in thickness are successfully obtained by repeating multi-coating and annealing. Based on the think film deposition processing, a laminated Pt/Ti/PZT/TiO2/SiO2/Si structure is proposed, and the PZT films are in-plane polarized by top InterDigital Electrodes (IDE). The capacitance-voltage curves of the PZT thick films are measured in a range of −40 V to 40 V, and the symmetric butterfly shapes of the curves indicate good ferroelectric properties of the films. The capacitance is found dependent on the parameters of the electrode configuration, and a simple equation for predicting the IDE capacitance is deduced.