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STUDY OF THE DEFECTS IN OXYGEN PLASMA IRRADIATED n/n+ Si
- Source :
- Acta Physica Sinica. 36:646
- Publication Year :
- 1987
- Publisher :
- Acta Physica Sinica, Chinese Physical Society and Institute of Physics, Chinese Academy of Sciences, 1987.
-
Abstract
- The defects in oxygen plasma irradiated Si have been studied. It is found that two kinds of defects E1(Ec-0.46 eV) and E2 (Ec-0.04 eV) are generated in the sample. The deep level optical spectroscopy reveals that defects E2 has a strong electron-phonon coupling, its Frank-Condon shift is 0.76 eV. For E1, the coupling is weaker, its Frank-Condon shift is 0.04 eV. The analysis shows that the phonon modes coupling to defects E1 and E2 is 28.7 meV and 20 meV respectively.
Details
- ISSN :
- 10003290
- Volume :
- 36
- Database :
- OpenAIRE
- Journal :
- Acta Physica Sinica
- Accession number :
- edsair.doi...........973e7918a26498974c4c2e47ea135853