Mass Spectrometric Investigations of Nano-Size Cluster Ions Produced by High Pressure Magnetron Sputtering

A comparison of quadrupole mass spectrometric (QMS) and transmission electron microscopic (TEM) characterization of silver nano-cluster deposition produced by a nano-cluster source consisting of a planar DC magnetron sputter source in a high pressure gas aggregation chamber is presented and discussed. Cluster sizes and size distributions detected by the two different techniques are compared and the differences are discussed. The effects of He to Ar ratio, gas flow and magnetron power on the cluster size distribution are evaluated. The influence of the target erosion and aging effects are mentioned, too (© 2012 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)