Back to Search
Start Over
Reflection electron energy loss spectroscopy of nanometric oxide layers and of their interfaces with a substrate
- Source :
- Materials Science and Engineering: A. 422:29-40
- Publication Year :
- 2006
- Publisher :
- Elsevier BV, 2006.
-
Abstract
- The aim of the present work was to evaluate the ability of reflection electron energy loss spectroscopy (REELS) as a non-destructive method to obtain depth profiles of dielectric constants, in a complementary way to transmission electron energy loss spectroscopy (TEELS). Two prototypical samples were used: a SrTiO3 single crystal and a 2 nm thick SiO2 layer on a Si single crystal. The single scattering cross-sections were decomposed into bulk, surface and interface contributions, with Drude–Lorentz parameters of the dielectric function fitted on available optical or TEELS data. We show that the evolution of the shape of the REELS single scattering cross-section with primary energy is qualitatively well reproduced by our model. In the case of the 2 nm SiO2 layer on Si, introducing the Si/SiO2 interface energy loss function contribution proved necessary to account for the interface plasmon peak observed, in very good agreement with reported TEELS measurements. REELS is well suited to studying dielectric properties of interfaces between a substrate and a nanometric layer.
- Subjects :
- Materials science
Scattering
business.industry
Mechanical Engineering
Electron energy loss spectroscopy
Physics::Optics
Dielectric
Condensed Matter Physics
Electron spectroscopy
Molecular physics
Surface energy
Condensed Matter::Materials Science
Optics
Mechanics of Materials
General Materials Science
business
Spectroscopy
Single crystal
Plasmon
Subjects
Details
- ISSN :
- 09215093
- Volume :
- 422
- Database :
- OpenAIRE
- Journal :
- Materials Science and Engineering: A
- Accession number :
- edsair.doi...........96abdc43179b90ac67b88b0151efbfbc