Origin of visible photoluminescence of Si-rich and N-rich silicon nitride films

Authors :: J. Parkhomenko
D. Murzalinov
P. Kopyciński
Paweł Żukowski
A. V. Mudryi
L. A. Vlasukova
O. V. Milchanin
Jerzy Żuk
V. Żhyvulka
F. F. Komarov
Source :: PRZEGLĄD ELEKTROTECHNICZNY. 1:186-188
Publication Year :: 2016
Publisher :: Wydawnictwo SIGMA-NOT, sp. z.o.o., 2016.

Subjects :: 010302 applied physics
Photoluminescence
Materials science
business.industry
02 engineering and technology
021001 nanoscience & nanotechnology
01 natural sciences
chemistry.chemical_compound
Silicon nitride
chemistry
0103 physical sciences
Optoelectronics
Electrical and Electronic Engineering
0210 nano-technology
business

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