Relationship of phase shift mask design and size of three-dimension nanostructures

MLA

Pongsakom Sihapitak, et al. “Relationship of Phase Shift Mask Design and Size of Three-Dimension Nanostructures.” 2020 27th International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD), Sept. 2020. EBSCOhost, widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsair&AN=edsair.doi...........962368bfa0348e31554dac93ea4d6cec&authtype=sso&custid=ns315887.

APA

Pongsakom Sihapitak, Yasuaki Ishikawa, Xudongfang Wang, Mutsunori Uenuma, & Yukiharu Uraoka. (2020). Relationship of phase shift mask design and size of three-dimension nanostructures. 2020 27th International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD).

Chicago

Pongsakom Sihapitak, Yasuaki Ishikawa, Xudongfang Wang, Mutsunori Uenuma, and Yukiharu Uraoka. 2020. “Relationship of Phase Shift Mask Design and Size of Three-Dimension Nanostructures.” 2020 27th International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD), September. http://widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsair&AN=edsair.doi...........962368bfa0348e31554dac93ea4d6cec&authtype=sso&custid=ns315887.