Top Electrode Engineering for High‐Performance Ferroelectric Hf 0.5 Zr 0.5 O 2 Capacitors

Authors :: Beom Yong Kim
In Soo Lee
Hyeon Woo Park
Yong Bin Lee
Suk Hyun Lee
Minsik Oh
Seung Kyu Ryoo
Seung Ryong Byun
Kyung Do Kim
Jae Hoon Lee
Deok‐Yong Cho
Min Hyuk Park
Cheol Seong Hwang
Source :: Advanced Materials Technologies.
Publication Year :: 2023
Publisher :: Wiley, 2023.

Subjects :: Mechanics of Materials
General Materials Science
Industrial and Manufacturing Engineering

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