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Evaluating nanoscale molecular homogeneity in EUV resists with nano-projectile SIMS

Authors :
Jander Cruz
Michael J. Eller
Stanislav V. Verkhoturov
Dmitriy S. Verkhoturov
Michael A. Robinson
James M. Blackwell
Emile A. Schweikert
Source :
Advances in Patterning Materials and Processes XXXIX.
Publication Year :
2022
Publisher :
SPIE, 2022.

Details

Database :
OpenAIRE
Journal :
Advances in Patterning Materials and Processes XXXIX
Accession number :
edsair.doi...........95ff4cb0c02807a9804d17fdd6d4f4e2

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