Scaling of MOVPE processes between 1 × 2″ and 95 × 2″ wafers

Subjects

Subjects :

Materials science
business.industry
General Engineering
Electrical engineering
Integrated circuit
Semiconductor device
Chemical vapor deposition
Epitaxy
law.invention
law
Optoelectronics
Wafer
Metalorganic vapour phase epitaxy
business
Scaling

Details

ISSN :

00262692

Volume :

27

Database :

OpenAIRE

Journal :

Microelectronics Journal

Accession number :

edsair.doi...........95bdf9ec299cbe38d593ef04b9cf06e0

Full Text :

https://doi.org/10.1016/0026-2692(95)00068-2